RESEARCH STUDY ON DESIGN OF HIGH TRANSCONDUCTANCE FIELD-EFFECT TRANSISTOR.
Abstract
The program was undertaken to devise means of fabricating a field effect transistor having a high transconductance and a low capacitance. It was originally planned to build this device by growing a P-type layer on an N-type substrate. However, it was found that this could not be done with any repeatability, and therefore P-type substrates were substituted for the N-type. During the program, a method for masking and etching silicon slices to form mesas was developed, and conditions for realizing mesas of uniform height over an entire slice or from slice to slice were found. (Author)
Document Details
- Document Type
- Technical Report
- Publication Date
- May 23, 1964
- Accession Number
- AD0708936
Entities
Organizations
- Sprague Electric