CHARACTERIZATION OF SILICON SURFACES BY THE ELECTRON ENERGY LOSS SPECTRUM,

Abstract

The energy loss spectra of silicon during several stages of the cleaning treatment have been studied in a LEED apparatus. A layer of beta-SiC formed on the silicon surface is detected. The results suggest that the energy loss spectrum is sensitive to the change in chemical composition and electronic structure of the solid surface. (Author)

Document Details

Document Type
Technical Report
Publication Date
Jun 01, 1970
Accession Number
AD0709325

Entities

People

  • P. S. P. Wei

Organizations

  • Boeing

Tags

Communities of Interest

  • Energy and Power Technologies

DTIC Thesaurus Topics

  • Chemical Composition
  • Electron Energy
  • Electrons
  • Energy
  • Spectra

Fields of Study

  • Physics

Readers

  • Atmospheric Science / Meteorology, specifically Wind Wave Turbulence.
  • Materials Science and Engineering.
  • Surface Engineering/Surface Coating Technology.

Technology Areas

  • Microelectronics
  • Microelectronics - Graphene