RESEARCH ON THE SPUTTERING OF MULTICOMPONENT MATERIALS BY ION BOMBARDMENT.

Abstract

Results are given of (1) a study of the cone formation which arises at the surface of a high sputtering yield target such as Cu when it is seeded during sputtering with another material such as Mo, and (2) the analysis of composition changes at the surface of multicomponent targets under ion bombardment and of sputter deposited films by means of in situ auger electron analysis. (Author)

Document Details

Document Type
Technical Report
Publication Date
May 01, 1970
Accession Number
AD0709652

Entities

People

  • G. K. Wehner

Organizations

  • University of Minnesota

Tags

DTIC Thesaurus Topics

  • Auger Electrons
  • Charged Particles
  • Electrons
  • Elementary Fermions
  • Elementary Particles
  • Fermions
  • Ion Bombardment
  • Leptons
  • Materials
  • Sputtering
  • Subatomic Particle Manipulation
  • Subatomic Particles

Readers

  • Combustion science or combustion engineering.
  • Electrochemical Engineering/ Fuel Cell Technologies
  • Solar Physics

Technology Areas

  • Microelectronics
  • Microelectronics - Graphene