SCANNING ELECTRON MICROSCOPY (A REVIEW OF THE FIRST TWO YEARS' WORK USING THE CAMBRIDGE 'STEREOSCAN' MICROSCOPE),

Abstract

The report is a review of the work carried out in the Materials Section of the Reliability and Measurement Group, using the Cambridge Scanning Electron Microscope. The work done using the instrument covers 'in house' applications, both within the parent Group, and for other Groups within the Establishment; work with contractors and research organisations on contract to the Ministry; and also work for outside industry on a cost shared basis. The report does not attempt to cover all the work done, but reviews in basically chronological order some of the interesting items studied; these are selected to illustrate the scope of the equipment, and show how a breakthrough in microscope technology has been achieved. (Author)

Document Details

Document Type
Technical Report
Publication Date
Mar 01, 1970
Accession Number
AD0711810

Entities

People

  • Jean M. Plaw
  • K. Head

Tags

DTIC Thesaurus Topics

  • Contractors
  • Contracts
  • Electron Microscopes
  • Electron Microscopy
  • Electrons
  • Microscopes
  • Microscopy
  • Optical Equipment
  • Optical Magnification Devices
  • Scanning
  • Scanning Electron Microscopes
  • Scanning Electron Microscopy

Readers

  • Research Science/Academic Research
  • Systems Analysis and Design
  • Technical Research and Report Writing.

Technology Areas

  • Microelectronics