CLEAN ROOM FOR MICRO-MINIATURIZATION PHOTOGRAPHIC FACILITY.

Abstract

The report covers the design and construction of a horizontal laminar flow clean room complex which supports the operation of a Borrowdale micro-miniaturization camera. Temperature and humidity controlled ultraclean ambient conditions were provided to assure clean and undistorted photographic masks which are used in the photolithographic process of fabricating micro-miniature circuits. All the rooms of the complex are Class 100 except for a general work space which is Class 100,000. Under clean room conditions, image reductions are only limited by the resolution of the photographic emulsions. (Author)

Document Details

Document Type
Technical Report
Publication Date
Sep 01, 1970
Accession Number
AD0711938

Entities

People

  • Richard A. Lechner

Organizations

  • United States Army Communications-Electronics Command

Tags

DTIC Thesaurus Topics

  • Construction
  • Dispersions
  • Emulsions
  • Flow
  • Humidity
  • Laminar Flow
  • Miniaturization
  • Photographic Emulsions
  • Wet Bulb Temperature

Readers

  • Computer Science/Computer Engineering/Data Science/Digital Signal Processing.
  • Geodesy
  • Thin Film Deposition Science.

Technology Areas

  • Space
  • Space - Hall-Effect Thruster