LOW TEMPERATURE SILICON THERMOMETER AND BOLOMETER.

Abstract

By simple diffusion and etching procedures low temperature sensitive surface layers can be prepared on otherwise insulating silicon substrates. Temperature coefficients of the resistance of these layers of the order of unity can be obtained at any temperatures below 20K. The usefulness of the silicon device as a low temperature thermometer and bolometer is demonstrated. (Author)

Document Details

Document Type
Technical Report
Publication Date
Aug 01, 1970
Accession Number
AD0711960

Entities

People

  • H. C. Kirsch
  • R. Bachmann
  • Theodore H. Geballe

Organizations

  • Stanford University

Tags

DTIC Thesaurus Topics

  • Bolometers
  • Coefficients
  • Diffusion
  • Low Temperature
  • Resistance
  • Substrates
  • Temperature Coefficients
  • Thermometers

Readers

  • Electronics Engineering
  • Fluid Dynamics.
  • Materials Science and Engineering.

Technology Areas

  • Microelectronics
  • Microelectronics - Graphene