Chemical Vapor Deposition Study.
Abstract
A brief summary of the activities over the last six months is presented. Studies range from the deposition kinetics through the production of CVD tungsten tubes to their analysis via X-rays, mechanical property studies and microstudies.
Document Details
- Document Type
- Technical Report
- Publication Date
- Oct 01, 1970
- Accession Number
- AD0714517
Entities
Organizations
- University of Utah