Chemical Vapor Deposition Study.

Abstract

A brief summary of the activities over the last six months is presented. Studies range from the deposition kinetics through the production of CVD tungsten tubes to their analysis via X-rays, mechanical property studies and microstudies.

Document Details

Document Type
Technical Report
Publication Date
Oct 01, 1970
Accession Number
AD0714517

Entities

Organizations

  • University of Utah

Tags

DTIC Thesaurus Topics

  • Chemical Vapor Deposition
  • Deposition (Materials Processing)
  • Kinetics
  • Material Coating Processes
  • Materials Processing
  • Mechanical Properties
  • Production
  • Tungsten
  • Vapor Deposition
  • X Rays

Readers

  • Surface Engineering/Surface Coating Technology.
  • Technical Research and Report Writing.