Content Mapping Techniques for Qualitative and Semiqualitative Analysis with the Electron Microbeam Probe.

Abstract

Content mapping of small surface areas with the electron microbeam probe can be used to quickly obtain very effectively both qualitative and quantitative information. An automatic content mapping device is available with the Hitachi Perkin-Elmer XMA-S Electron Probe Micro-analyzer that can cover an area up to 50 microns by 50 microns. Compared with the conventional X-ray image, advantages of content mapping include enhancement of the contrast of the element density distribution for specimens having an enriched element density with slight variation and for specimens under high magnification with poor contrast. The content mapping device is described and examples of content maps of various alloy composition and concentrations are shown. (Author)

Document Details

Document Type
Technical Report
Publication Date
Sep 01, 1970
Accession Number
AD0714567

Entities

People

  • James S. Solomon
  • W. L. Baun

Organizations

  • University of Dayton Research Institute

Tags

DTIC Thesaurus Topics

  • Analyzers
  • Automatic
  • Contrast
  • Electron Probes
  • Electrons
  • Magnification
  • Microbeams
  • Probes
  • X Rays

Readers

  • Aerosol Science/Aerosol Physics
  • Computer Vision.
  • Thermal Physics or Thermal Science.

Technology Areas

  • Microelectronics