Electron Spectrometer for Surface Analysis,

Abstract

An electron spectrometer of the LEED-Auger type was installed n the authors' laboratory. The principle of operation, the significance of the measurements and possible applications are described. The capabilities of the technique are demonstrated by studying the clean and gas-covered silicon (111) surface. The results suggest that the spectrometer is a sensitive and versatile instrument for the analysis of surface composition, structure and properties. (Author)

Document Details

Document Type
Technical Report
Publication Date
Nov 01, 1970
Accession Number
AD0717280

Entities

People

  • A. W. Smith
  • P. S. P. Wei

Organizations

  • Boeing

Tags

DTIC Thesaurus Topics

  • Buildings And Structures
  • Electrons
  • Measurement
  • Measuring Instruments
  • Planimetry
  • Spectrometers
  • Surface Analysis
  • Surfaces

Readers

  • Solar Physics
  • Systems Analysis and Design
  • Thin Film Deposition Science.

Technology Areas

  • Microelectronics
  • Microelectronics - Graphene