Advanced Electronic Technology
Abstract
Contents: Integrated circuit development; Photolithographic interconnection of plastic-imbedded semiconductor ships; Semiconductor testing; Machine development; Solid state device research; Materials research; Physics of solids; Microelectronics.
Document Details
- Document Type
- Technical Report
- Publication Date
- May 15, 1971
- Accession Number
- AD0726535
Entities
People
- Alan L. McWhorter
- Melvin A. Herlin
Organizations
- Massachusetts Institute of Technology