RF Sputtering of Zinc Sulphide,

Abstract

The report describes the work that was done for a period of eight months on the RF sputtering of zinc sulphide doped thin films on to silicon. Details of the sputtering process and an assessment of equipment improvements are included. (Author)

Document Details

Document Type
Technical Report
Publication Date
Jun 01, 1970
Accession Number
AD0729543

Entities

People

  • R. J. Woodward

Tags

Communities of Interest

  • Advanced Electronics

DTIC Thesaurus Topics

  • Erosion
  • Films
  • Materials
  • Sputtering
  • Sulfides
  • Thin Films

Readers

  • Aerospace Test and Evaluation
  • Surface Engineering/Surface Coating Technology.