The Formation of Refractory Metal Alloys by Simultaneous Deposition from the Gaseous Phase.
Abstract
This investigation was conducted to obtain information for the design and construction of a laboratory chemical vapor-deposition system. A discussion provides a background of the vapor-deposition process. The literature was studied with particular attention to the construction of chemical vapor-deposition equipment. Chemical vapor- deposition apparatus was assembled with stainless steel as the principal material of construction. The report includes a schematic diagram of the deposition system. The system is designed to provide a flexible method for alloy deposition without extensive equipment modification. (Author-PL)
Document Details
- Document Type
- Technical Report
- Publication Date
- Aug 01, 1971
- Accession Number
- AD0730319
Entities
People
- Ronald T. Shinbori