Sputtered Zinc Sulphide Films on Silicon,

Abstract

The design of a triode RF sputtering system for the deposit of high purity films of Zinc Sulphide is outlined. It is shown that the deposited films have a high degree of purity and are highly oriented crystallographically. (Author)

Document Details

Document Type
Technical Report
Publication Date
Mar 01, 1971
Accession Number
AD0730332

Entities

People

  • T. G. R. Rawlins

Tags

DTIC Thesaurus Topics

  • Erosion
  • Ores
  • Sputtering
  • Sulfides

Fields of Study

  • Materials science

Readers

  • Electronics Engineering
  • Materials Science and Engineering.
  • Nanofabrication and Microfabrication.