Thin Film Thermistors,
Abstract
Thin film thermistors have been deposited on glass substrates by D.C. sputtering mixed oxide ceramic materials. Devices have been produced with resistances in the range 1000 ohms to several megohms with negative temperature coefficients of resistance from 1% to 5% per C dependent upon the resistivity of the film material. Chrome-gold contacts to the films have been found adequate so far in that the devices have low noise characteristics, and also adhere well to the substrates over the temperature range -100C to + 150C. Some important manufacturing variables have been isolated and are discussed, together with suggestions for improvements. Areas requiring more research and development work are indicated. (Author)
Document Details
- Document Type
- Technical Report
- Publication Date
- Dec 01, 1970
- Accession Number
- AD0731337
Entities
People
- B. J. Franklin
- S. K. Archer