Failure Mechanism Studies on Multilevel Metallization Systems for LSI.

Abstract

The objective of this investigation was the determination of quantitative information about the mechanisms of failure associated with aluminum-silicon dioxide-aluminum two-layer interconnection systems used on large scale integrated circuits. (Author)

Document Details

Document Type
Technical Report
Publication Date
Sep 01, 1971
Accession Number
AD0731796

Entities

People

  • P. B. Ghate

Organizations

  • Texas Instruments

Tags

DTIC Thesaurus Topics

  • Aluminum
  • Circuits
  • Dioxides
  • Elements
  • Failure Mode And Effect Analysis
  • Integrated Circuits
  • Large Scale Integrated Circuits
  • Large Scale Integration
  • Semiconductor Manufacturing
  • Silicon
  • Silicon Dioxide

Readers

  • Integrated Circuit Design and Technology.
  • Systems Analysis and Design