Method of Checking Thickness of Thin Films during Vacuum-Spraying Process,
Abstract
Thin film thickness can be checked during a vacuum-spraying process by a spectrum analyzer which scans the light passing through the film continuously. A photoelectric receiver sends a signal to the amplifier of the vertical deflection of an oscillograph. The horizontal sweep is controlled by a signal which is proportional to the light wave length. The shape of the graph on the screen is compared with a nominal graph within a spectrum region spanning at least half an octave on the wave length scale. When both graphs have the greatest similarity in shape, the spraying process is stopped. (Author)
Document Details
- Document Type
- Technical Report
- Publication Date
- Aug 20, 1971
- Accession Number
- AD0733206
Entities
People
- L. B. Katsnelson
- Sh. A. Furman
Organizations
- National Air and Space Intelligence Center