Electrical Properties of Thin Films of Alumina.

Abstract

The report consists of a literature survey on the electrical properties of alumina and aluminum oxide thin films. A bibliographic listing of reports is included along with abstracts from most of them.

Document Details

Document Type
Technical Report
Publication Date
Nov 01, 1967
Accession Number
AD0735627

Entities

People

  • John T. Milek
  • Meta Neuberger

Organizations

  • Hughes Aircraft Company

Tags

Communities of Interest

  • Advanced Electronics

DTIC Thesaurus Topics

  • Abstracts
  • Aluminum
  • Aluminum Oxides
  • Electrical Properties
  • Films
  • Literature
  • Literature Surveys
  • Oxides
  • Thin Films

Readers

  • Business Analytics
  • Nanofabrication and Microfabrication.
  • Semiconductor Device Technology