Electron Beam Fabrication of High Frequency, Low Loss, Wide Band-Width Interdigital Acoustic Surface Wave Transducers.

Abstract

Electron beam fabrication techniques for the building of surface acoustic wave transducers are described. The report contains descriptions of the electron beam equipment used for writing the desired patterns and also the resist and thin film techniques used to produce the metal structures. A list of devices built to the time of the report is included. (Author)

Document Details

Document Type
Technical Report
Publication Date
Feb 16, 1971
Accession Number
AD0738184

Entities

People

  • Alec N. Broers
  • Michael Hatzakis

Organizations

  • IBM Thomas J. Watson Research Center

Tags

DTIC Thesaurus Topics

  • Acoustic Waves
  • Doppler Effect
  • Electron Beams
  • Electrons
  • Fabrication
  • Frequency
  • Frequency Shift
  • Surface Acoustic Waves
  • Surface Waves
  • Thin Films
  • Transducers
  • Waves

Fields of Study

  • Physics

Readers

  • Electronics Engineering
  • Microwave Engineering.
  • Nanofabrication and Microfabrication.

Technology Areas

  • Directed Energy
  • Microelectronics
  • Microelectronics - Graphene
  • Microelectronics - Microelectromechanical Systems