New Methods for Growth and Characterization of GaAs and Mixed III-V Semiconductor Crystals
Abstract
The purpose of the program is to develop new and improved methods for the growth and characterization of gallium arsenide (GaAs) and mixed III-V semiconductor crystals. A new Czochralski technique has been developed. An apparatus for liquid-encapsulated floating-zone melting of III-V crystals has been constructed. The kinetics of drying and moisture absorption by boron oxide encapsulant have been measured and published. Further improvements have been made in the travelling heater growth method. A new method is being developed to lower oxygen concentrations during liquid epitaxial growth of GaAs, so as to permit growth at significantly lower temperatures. The influence of bending and short term heating on mobility and carrier concentration of GaAs has been studied.
Document Details
- Document Type
- Technical Report
- Publication Date
- Jan 01, 1972
- Accession Number
- AD0739374
Entities
People
- William R. Wilcox
Organizations
- University of Southern California