Crystallization of Thin Films,
Abstract
The collection considers the state of the research into epitaxial growth processes of semiconductor layers, contains material on electrochemical methods of obtaining fine films, the results of studies in diffusion, the migration and distribution of impurities, and discusses the electrophysical characteristics and structure of the thin films and of radiation effects in them. In connection with the problem of the effect of the films on the structural peculiarities of the substrates, and with the problem of self-alloying, the results of a study of the characteristics of monocrystals used as substrates and having an independent significance are presented. (Author)
Document Details
- Document Type
- Technical Report
- Publication Date
- Mar 21, 1972
- Accession Number
- AD0741859
Entities
People
- U. A. Arifov
Organizations
- United States Army Foreign Science and Technology Center