Piezoelectric-Piezoresistive Coupled Strain Transducer.

Abstract

The study explores the possibility of using a complementary coupling of the piezoresistive and piezoelectric effects to produce a very sensitive strain transducer. The piezoresistive effect of Si is combined with the piezoelectric effect of a ZnO thin-film in a new type of strain sensor, called the PZER. The polarization field of the ZnO activation layer changes the carrier density in the piezoresistive element. The PZER has up to 280% of the strain sensitivity of a normal piezoresistive strain transducer. The theory, fabrication, and evaluation of the PZER's is thoroughly discussed. (Author)

Document Details

Document Type
Technical Report
Publication Date
Mar 01, 1972
Accession Number
AD0743318

Entities

People

  • Gerald L. Cline

Organizations

  • Air Force Institute of Technology

Tags

DTIC Thesaurus Topics

  • Couplings
  • Fabrication
  • Films
  • Piezoelectric Effect
  • Polarization
  • Sensitivity
  • Test And Evaluation
  • Thin Films
  • Transducers

Readers

  • Integrated Circuit Design and Technology.
  • Materials Science and Engineering.
  • Optical Fiber Sensing and Electromagnetic Propagation.