Thin Film Interfaces. Properties of Very Thin Coatings for Electrical Applications.
Abstract
The report results of optical (ellipsometric) and electrical characterization of thin interfaces are summarized. Documentation of publications is given to 13 publications which resulted from the effort and 30 related publications, all involving the use of ellipsometry. (Author)
Document Details
- Document Type
- Technical Report
- Publication Date
- Apr 14, 1972
- Accession Number
- AD0744065
Entities
People
- N. M. Bashara
Organizations
- University of Nebraska–Lincoln