Electron Beam Fabrication of High Frequency, Low Loss, Wide Band-Width Interdigital Acoustic Surface Wave Transducers.

Abstract

Electron beam fabrication techniques for building surface acoustic wave transducers have been developed. Descriptions of the electron beam equipment used for writing the desired patterns and also the resist and thin film techniques used to produce the metal structures have already been reported in a previous report (February 1971). This shorter final report contains additional information on the fabrication techniques, and also a description of a digital pattern generator for transducer patterns. A complete list of devices made during the contract is included. (Author)

Document Details

Document Type
Technical Report
Publication Date
Apr 01, 1972
Accession Number
AD0744092

Entities

People

  • Alec N. Broers
  • Michael Hatzakis

Organizations

  • IBM Thomas J. Watson Research Center

Tags

DTIC Thesaurus Topics

  • Acoustic Waves
  • Doppler Effect
  • Electron Beams
  • Electrons
  • Fabrication
  • Frequency
  • Frequency Shift
  • Surface Acoustic Waves
  • Surface Waves
  • Thin Films
  • Transducers
  • Waves

Fields of Study

  • Physics

Readers

  • Electronics Engineering
  • Materials Science and Engineering.
  • Thin Film Deposition Science.

Technology Areas

  • Directed Energy
  • Microelectronics
  • Microelectronics - Graphene
  • Microelectronics - Microelectromechanical Systems