Device for Deposition of Film Microcircuits,

Abstract

A unit for the deposition for film microcircuits, containing a vacuum chamber with a mechanism for lifting the chambers hood, drive mechanism to move the substrates and stencils placed on movable platforms, shielding partition and adjusting plate, is described. (Author)

Document Details

Document Type
Technical Report
Publication Date
Apr 04, 1972
Accession Number
AD0744272

Entities

People

  • B. N. Dynkov
  • F. E. Evteev
  • M. K. Samarskaya
  • P. A. Dmitriev

Organizations

  • National Air and Space Intelligence Center

Tags

DTIC Thesaurus Topics

  • Chambers
  • Microcircuits
  • Platforms
  • Shielding
  • Substrates
  • Vacuum
  • Vacuum Chambers

Readers

  • Materials Science
  • Robotics and Automation.
  • Semiconductor Device Technology

Technology Areas

  • Microelectronics
  • Microelectronics - Graphene
  • Microelectronics - Microelectromechanical Systems