The Oxidation of Tantalum.

Abstract

Scanning electron microscopy (SEM) in conjunction with transmission electron microscopy (TEM) and optical microscopy was used to study the initial stages of the oxidation of high purity (111) and (110) Ta single crystals and large-grained 5 mil-thick sheet of approximately (001) orientation. Two different oxidation temperatures 530C and 800C were used as well as two different pressures, 1 atmosphere and typically 0.001 torr oxygen. (Author)

Document Details

Document Type
Technical Report
Publication Date
May 01, 1972
Accession Number
AD0745341

Entities

People

  • Dennis J. Kampe
  • Kenneth R. Lawless

Organizations

  • University of Virginia

Tags

DTIC Thesaurus Topics

  • Atmospheres
  • Crystals
  • Electron Microscopy
  • Electrons
  • Microscopy
  • Optical Analysis
  • Orientation (Direction)
  • Oxidation
  • Scanning
  • Scanning Electron Microscopy
  • Single Crystals
  • Transmission Electron Microscopy

Readers

  • Thin Film Deposition Science.

Technology Areas

  • Microelectronics
  • Microelectronics - Graphene