Some Problems in Decreasing the Effect of Dust in the Production of Semiconductor Products,

Abstract

The effect of one component of the microclimate, namely dust, on the quality of semiconductor products is discussed in this article. Tests are conducted for the purpose of finding dominant sources of dust and the effectiveness of air filters. (Author)

Document Details

Document Type
Technical Report
Publication Date
Aug 01, 1972
Accession Number
AD0749610

Entities

People

  • B. Saar
  • E. Khansen
  • M. Puusepp

Organizations

  • National Air and Space Intelligence Center

Tags

DTIC Thesaurus Topics

  • Air Filters
  • Carbides
  • Chemical Compounds
  • Compound Semiconductors
  • Electronics
  • Filters
  • Inorganic Carbon Compounds
  • Inorganic Chemicals
  • Production
  • Semiconductors
  • Silicon Carbide
  • Silicon Compounds
  • Solid State Electronics

Readers

  • Aerosol Science/Aerosol Physics
  • Economics
  • Semiconductor Device Technology

Technology Areas

  • Microelectronics