The Development of a Probe-Type Thin Film Microthermocouple for Biomedical Use.
Abstract
Thin-film probe type thermocouples of micron dimensions can be produced by vapor deposition on quartz substrates. Processes for fabrication are described. The problem of low seebeck coefficient is solved by use of special annealing techniques and choice of element materials. Insulating films for element separation, electrical isolation and environmental protection are discussed. Response time of the microthermocouples is experimentally determined and compared with a theoretical model. Applications of the microthermocouple are discussed with respect to bio-medical usage. (Author)
Document Details
- Document Type
- Technical Report
- Publication Date
- Feb 02, 1972
- Accession Number
- AD0752236
Entities
People
- E. A. Ripperger
- W. D. Martins
Organizations
- University of Texas at Austin