Defect Characterization in III-V Compounds.

Abstract

Homoepitaxial films of GaAs deposited from the vapor phase grow by the nucleation and coalescence of islands. The islands coalesce to form a continuous layer when their thickness equals 750 plus or minus 250 A. A pseudomorphic layer of GaAs has been found in growths of undoped or lightly doped GaAs on heavily-doped (Te) substrates. The position of the dislocations was an order of magnitude closer to the original growth interface than that point where they are initially expected to be found in the crystal. Reversing the role of substrate and epitaxial layer by growing Se-doped layers of various concentrations onto undoped substrates has led to further insights: (a) strain-induced precipitation of dopant atoms occurs as a strain-relief mechanism, and (b) observations of orthogonal, cross-sectional specimens have revealed that dislocations for the zincblende structure are asymmetric. (Author)

Document Details

Document Type
Technical Report
Publication Date
Dec 01, 1972
Accession Number
AD0754821

Entities

People

  • Marvin S. Abrahams

Organizations

  • RCA Corporation

Tags

DTIC Thesaurus Topics

  • Coalescence
  • Dislocations
  • Nucleation
  • Observation
  • Phase
  • Precipitation
  • Substrates
  • Thickness
  • Vapor Phases

Fields of Study

  • Materials science

Readers

  • Semiconductor Device Technology
  • Thin Film Deposition Science.