Scanning-Electron-Microscopy of Dielectrics,

Abstract

When examining samples of low conductivity with a scanning electron microscope (REM) charging of the body and surface takes place. This is brought about by the electrons of the probe. In the majority of cases this leads to a deterioration in the resolution and to a considerable distortion of the image. In order to prevent charging, several methods are discussed.

Document Details

Document Type
Technical Report
Publication Date
Nov 01, 1972
Accession Number
AD0754912

Entities

People

  • E. J. Rau
  • G. V. Spivak

Tags

DTIC Thesaurus Topics

  • Electron Microscopes
  • Electron Microscopy
  • Electrons
  • Microscopes
  • Microscopy
  • Scanning
  • Scanning Electron Microscopes
  • Scanning Electron Microscopy

Fields of Study

  • Physics

Readers

  • Systems Analysis and Design
  • Thermal Physics or Thermal Science.
  • Thin Film Deposition Science.

Technology Areas

  • Microelectronics