The Influence of Annealing on Thin Films of Beta SiC

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Document Details

Document Type
Technical Report
Publication Date
Dec 19, 1972
Accession Number
AD0755792

Entities

People

  • Charles E. Ryan
  • Irvin Berman
  • James R. Littler
  • Robert C. Marshall

Organizations

  • Air Force Cambridge Research Laboratories

Tags

DTIC Thesaurus Topics

  • Air Force
  • Ceramic Materials
  • Chemical Vapor Deposition
  • Compound Semiconductors
  • Crystal Growth
  • Crystal Structure
  • Crystals
  • Diffraction
  • Electron Diffraction
  • Electron Microscopes
  • Films
  • Low Temperature
  • Materials
  • Silicon Carbide
  • Single Crystals
  • Thin Films
  • United States