Evaluation of Multilayer Thin Films.
Abstract
Multilayer thin-film structures were prepared and tested for strength by the bulge test and, in some cases, by uniaxial tensile testing on an Instron machine with a specially designed adapter. The calculated strengths of Al2O3-metal specimens ranged up to 113 kpsi. Those of aluminum-copper specimens ranged from 47 to 109 kpsi, while thin single films of copper alone gave 138-328 kpsi. Bulge testing of thin blown borosilicate glass gave values of calculated stress and strain lying on straight lines with positive intercepts on the stress axis, and coincidence of curves for increasing and decreasing test pressure showed that the specimens behaved elastically. (Author Modified Abstract)
Document Details
- Document Type
- Technical Report
- Publication Date
- Mar 01, 1973
- Accession Number
- AD0757723
Entities
People
- Fred Ordway