Fabrication of Elastic Surface Devices by Chemical Etching.
Abstract
The fabrication of elastic surface-wave encoders and decoders for use in secure, antijam command, control, and communications systems is described. The processes consist of substrate cleaning, vacuum evaporation of thin aluminum films, photolithography, and chemical etching. Using these techniques, surface-wave interdigital transducer gratings have been fabricated with linewidths as small as 1.5 micrometer. A discussion of the factors affecting the yield of these devices is included. (Author)
Document Details
- Document Type
- Technical Report
- Publication Date
- Dec 19, 1972
- Accession Number
- AD0758762
Entities
People
- Jose H. Silva
- William J. Kearns
Organizations
- Air Force Cambridge Research Laboratories