X-ray Lithography: A New High Resolution Replication Process.

Abstract

A newly developed x-ray lithographic process is described and its prospects for making sub-micron resolution pattern definition a common practice are assessed. (Author)

Document Details

Document Type
Technical Report
Publication Date
Mar 14, 1972
Accession Number
AD0759257

Entities

People

  • David L. Spears
  • Henry I. Smith

Organizations

  • Massachusetts Institute of Technology

Tags

Communities of Interest

  • Materials and Manufacturing Processes

DTIC Thesaurus Topics

  • High Resolution
  • Lithography
  • Lithography (Fabrication)
  • Reproduction (Copying)
  • X Ray Lithography
  • X Rays

Readers

  • Nanofabrication and Microfabrication.
  • Systems Analysis and Design