Coordination Chemistry and Kinetics of Preferential Etching on Surfaces of TiO2 (Rutile).

Abstract

Three different types of etch pits were observed on the (001) surfaces of rutile after etching in a KHSO4 flux at temperatures between 400 and 550C. A chemical reaction scheme is presented, which along with a consideration of the surface chemistry of the various crystallographic faces, is used to explain the kinetics of dissolution of the substrate and hence the observed shapes of the etch pits. Etching of a defect is enhanced in surface regions where silver is photochemically deposited and removed prior to the etching. This phenomenon is explained in terms of a hole (or electron) trapping mechanism at a crystal defect. (Author)

Document Details

Document Type
Technical Report
Publication Date
Apr 30, 1973
Accession Number
AD0759259

Entities

People

  • Armond B. Chase
  • Paul D. Fleischauer

Organizations

  • The Aerospace Corporation

Tags

DTIC Thesaurus Topics

  • Chemical Reactions
  • Chemistry
  • Crystal Chemistry
  • Crystal Defects
  • Crystals
  • Electrons
  • Kinetics
  • Physical Chemistry
  • Substrates
  • Surface Chemistry
  • Surface Reactions

Fields of Study

  • Chemistry
  • Materials science

Readers

  • Thin Film Deposition Science.

Technology Areas

  • Microelectronics
  • Microelectronics - Graphene