Novel Surface Acoustic Wave Transducer Techniques
Abstract
The research demonstrates that a new electron-beam image projection exposure technique, the 'slit-lens', can be applied to the fabrication of high resolution interdigital patterns for use as high frequency surface acoustic wave transducers. Further research efforts include the development of the ancillary thin-film techniques for making metallic patterns on piezoelectric substrates, and the design, fabrication, and electrical test of actual surface acoustic wave delay lines produced by the foregoing techniques.
Document Details
- Document Type
- Technical Report
- Publication Date
- Apr 01, 1973
- Accession Number
- AD0761625
Entities
People
- Eugene R. Westerberg
- Robert E. Lee
Organizations
- SRI International