Sputtering of Multicomponent Materials by Ion Bombardment.

Abstract

Papers which resulted from the research are: 'Cone Formation on Metal Targets during Sputtering'; 'Alloy Sputtering Studies with in situ Auger Electron Spectroscopy'; 'Auger Electron Spectroscopy Studies of Sputter Deposition and Sputter Removal of Mo from Various Metal Surfaces'; 'Escape Length of Auger Electrons'; and 'Purple Plague and Au-Al Diffusion Studies with Auger Electron Spectroscopy'. (Modified author abstract)

Document Details

Document Type
Technical Report
Publication Date
Jun 01, 1973
Accession Number
AD0762813

Entities

People

  • Gottfried K. Wehner

Organizations

  • University of Minnesota

Tags

DTIC Thesaurus Topics

  • Auger Electron Spectroscopy
  • Auger Electrons
  • Electron Spectroscopy
  • Electrons
  • Ion Bombardment
  • Spectroscopy
  • Sputtering

Readers

  • Thin Film Deposition Science.

Technology Areas

  • Microelectronics
  • Microelectronics - Graphene