Integrated Optics

Abstract

Films of optical quality suitable for waveguide and optical device elements have been designed and growth processes developed for producing such films. Films with various compositions and thicknesses have been prepared by chemically depositing GaAs and Ga(1-x)Al(x)As upon GaAlAs and GaAs. Film thicknesses from 2 to 17 micrometers and compositions from x = 0.02 to x = 0.25 (Ga(1-x)Al(x)As) were obtained. Techniques for determining the Ga-to-Al ratio have been developed (i.e., photoluminescent determination of bandgap and electron microprobe analysis) as controls for meeting the design parameters. Device structures consisting of channel guides and directional couplers have been developed in GaAs using ion machining techniques.

Open PDF

Document Details

Document Type
Technical Report
Publication Date
Jan 01, 1973
Accession Number
AD0763101

Entities

People

  • Amnon Yariv
  • Ogden J. Marsh
  • Richard M. Madden
  • Sanjiv Kamath

Organizations

  • HRL Laboratories

Tags

DTIC Thesaurus Topics

  • Air Force
  • Band Gaps
  • Construction
  • Control Systems
  • Diagrams
  • Epitaxial Growth
  • Fabrication
  • Integrated Optics
  • Ion Beams
  • Materials
  • Measurement
  • Optical Properties
  • Optics
  • Refractive Index
  • Semiconductors
  • Thick Films
  • Thin Films

Fields of Study

  • Materials science

Readers

  • Semiconductor Device Technology
  • Thin Film Deposition Science.

Technology Areas

  • Microelectronics
  • Microelectronics - Graphene