Sputtering (Industrial Process).

Abstract

The bibliography contains citations of unclassified and unlimited reports on Sputtering as used in industrial processes dealing with techniques and applications of coatings and films. Discussed are metal films, integrated circuits, thin films, capacitors, resistors and transistors. (Author)

Document Details

Document Type
Technical Report
Publication Date
Jul 01, 1973
Accession Number
AD0763600

Entities

Organizations

  • Defense Technical Information Center

Tags

Communities of Interest

  • Materials and Manufacturing Processes

DTIC Thesaurus Topics

  • Active Electronic Components
  • Bibliographies
  • Capacitors
  • Circuits
  • Electronic Components
  • Electronic Equipment
  • Electronics
  • Field Effect Transistors
  • Films
  • Integrated Circuits
  • Metal Films
  • Resistors
  • Semiconductor Devices
  • Sputtering
  • Thin Films
  • Transistors

Readers

  • Library and Information Science
  • Thin Film Deposition Science.