Scanning Ellipsometry as a Tool for the Characterization of Absorbing Surface Films.
Abstract
The general theory of reflection and of ellipsometry is reviewed. The new technique of scanning ellipsometry, which allows a conventional ellipsometer to be used to follow film growth dynamically, is described. A program is given which allows the characterization of an absorbing surface film (i.e., determination of its complex refractive index and thickness) from measured changes in the ellipsometric parameters Delta sub 0 and Psi sub 0 and in the relative reflectivity. The method is illustrated by an examination of the electrochemical formation of the anodic oxide film on platinum. (Author)
Document Details
- Document Type
- Technical Report
- Publication Date
- Jun 01, 1973
- Accession Number
- AD0766820
Entities
People
- B. D. Cahan
- Ernest B. Yeager
- Jean Horkans
Organizations
- Case Western Reserve University