Fundamental Studies of Semiconductor Heteroepitaxy

Abstract

;Contents: Theory of epitaxy and heteroepitaxial interfaces; Deposition studies and film preparation; Analysis and purification of chemical vapor deposition (CVD) reactants; Chemistry and reaction kinetics of CVD processes; Preparation and characterization of substrates; Al2O3 characterization by carrier injection and transport measurements.

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Document Details

Document Type
Technical Report
Publication Date
Aug 01, 1973
Accession Number
AD0767287

Entities

People

  • A. James Hughes
  • Arthur C. Thorsen
  • Harold M. Manasevit
  • Joseph L. Kenty
  • Ralph P. Ruth

Tags

Communities of Interest

  • Advanced Electronics
  • Energy and Power Technologies

DTIC Thesaurus Topics

  • Chemistry
  • Crystal Lattices
  • Crystal Structure
  • Crystallography
  • Crystals
  • Electron Microscopes
  • Electron Microscopy
  • Energy Bands
  • Epitaxial Growth
  • Mass Spectrometry
  • Materials
  • Materials Science
  • Measurement
  • Semiconductor Devices
  • Semiconductors
  • Solid State Physics
  • Surface Properties

Fields of Study

  • Chemistry
  • Materials science

Readers

  • Molecular Photonics/Laser Physics
  • Semiconductor Device Technology

Technology Areas

  • Microelectronics
  • Microelectronics - Graphene