Fundamental Studies of Semiconductor Heteroepitaxy (Part 3)
Abstract
;Contents: Work functions and surface double layer potentials of monovalent metals from a network model; Anisotropy in electrical properties of (001)Si(0112)Al2O3; Anisotropy in the electrical properties of N-type (221)Si/ (1122)Al2O3; Stress induced anisotropy in the electrical properties of Si/Al2O3; Bibliography - electron microscope in situ nucleation and growth studies; Electron scattering by gaseous atoms; Preliminary EM6 modifications for in situ chemical vapor deposition.
Document Details
- Document Type
- Technical Report
- Publication Date
- Aug 01, 1973
- Accession Number
- AD0767289
Entities
People
- A. J. Hughes
- Arthur C. Thorsen
- Harold M. Manasevit
- Joseph L. Kenty
- Ralph P. Ruth