Evaluation of Multilayer Thin Films.
Abstract
Multilayer thin-film composites of carbon-aluminum were prepared by vacuum evaporation of alternating layers a few hundred Angstroms thick. Up to 94 pairs of successive layers were deposited to produce composite films up to 12.5 micrometers (0.0005 in.) thick. The specimens were evaporated through a photoetched metal mask to produce a 'dogbone' shape for tensile testing, and were successfully removed without breakage by applying a thin release film of gold to the glass substrate before deposition of the composite and wetting the gold film with a small quantity of mercury afterward. A method is proposed by which the true tensile strength of the composite may be determined. (Modified author abstract)
Document Details
- Document Type
- Technical Report
- Publication Date
- Sep 01, 1973
- Accession Number
- AD0767724
Entities
People
- Fred Ordway
- James R. Graves