Ion Nitriding of Titanium in a Glow Discharge,

Abstract

The possibility of nitriding titanium in a glow discharge in a purified nitrogen medium was established. Nitriding in a glow discharge occurs two to three times faster than during furnance heating. The phase composition of the nitrided layer was defined as a function of processing mode. The depth of the nitride zone during processing in a glow discharge was no more than 3-4 micrometers Changing the nitriding regime affects the phase composition of the nitrided layer.

Document Details

Document Type
Technical Report
Publication Date
Sep 28, 1973
Accession Number
AD0768470

Entities

People

  • N. I. Syskov
  • Yu. K. Egorova

Organizations

  • National Air and Space Intelligence Center

Tags

DTIC Thesaurus Topics

  • Chemical Compounds
  • Elements
  • Glow Discharges
  • Heating
  • Materials
  • Micrometers
  • Nitrides
  • Nitriding
  • Nitrogen
  • Nitrogen Compounds
  • Titanium

Fields of Study

  • Physics

Readers

  • Chemistry (specifically Chemical Fluorescence)
  • Semiconductor Device Technology
  • Surface Coatings Technology.