Oxidation of Aluminum Nitride.

Abstract

The oxidation characteristics of hot-pressed aluminum nitride were investigated. Three materials were studied in the temperature range 1100 to 1400 C in 15, 150, and 400 torr oxygen environments. The oxidation process was evaluated using thermogravimetric measurements, X-ray diffraction, optical and scanning electron microscopy and electron microprobe results. (Modified author abstract)

Document Details

Document Type
Technical Report
Publication Date
May 22, 1973
Accession Number
AD0770038

Entities

People

  • Bruce A. Rasmussen

Organizations

  • Air Force Institute of Technology

Tags

DTIC Thesaurus Topics

  • Aluminum
  • Aluminum Nitrides
  • Diffraction
  • Electron Microscopy
  • Electrons
  • Materials
  • Measurement
  • Microscopy
  • Nitrides
  • Oxidation
  • Scanning Electron Microscopy
  • X Rays
  • X-Ray Diffraction

Fields of Study

  • Materials science

Readers

  • Materials Science (Mechanical Engineering).
  • Semiconductor Device Technology
  • Thermal Physics or Thermal Science.

Technology Areas

  • Microelectronics