Methods of Measurement for Semiconductor Materials, Process Control, and Devices.
Abstract
The quarterly progress report, twentieth of a series, describes NBS activities directed toward the development of methods of measurement for semiconductor materials, process control, and devices. Significant accomplishments during this reporting period include (1) completion of an initial identification of the more important problems in process control for integrated circuit fabrication and assembly as a basis for an expanded effort to be conducted in cooperation with ARPA, (2) completion of preparations for making silicon bulk resistivity wafer standards available to the industry, and (3) undertaking of new work to establish the relationship between carrier mobility and impurity density in silicon and to investigate test patterns for use in process control and evaluation. (Modified author abstract)
Document Details
- Document Type
- Technical Report
- Publication Date
- Nov 01, 1973
- Accession Number
- AD0771018
Entities
People
- W. Murray Bullis
Organizations
- National Institute of Standards and Technology