Digital Computer for Controlling Electronic-Lithographic Processes in Manufacturing Integral Systems ('Kiev-70'),

Abstract

A special-purpose computer 'Kiev-70' designed for controlling the electron-beam and ion-beam equipment, and also equipment of the coordinatograph type, is described.

Document Details

Document Type
Technical Report
Publication Date
Dec 10, 1973
Accession Number
AD0771633

Entities

People

  • V. M. Glushkov

Organizations

  • National Air and Space Intelligence Center

Tags

Communities of Interest

  • Materials and Manufacturing Processes

DTIC Thesaurus Topics

  • Beams (Radiation)
  • Charged Particles
  • Computers
  • Computing Devices
  • Digital Computers
  • Electron Beams
  • Electrons
  • Integrals
  • Ion Beams
  • Ions
  • Manufacturing
  • Particle Beams

Fields of Study

  • Physics

Technology Areas

  • Directed Energy
  • Microelectronics