Effect of Substrate Surface Roughness on the Morphology of Plasma-Polymerized Ethylene.

Abstract

Effects of the surface roughness of substrate material on the morphology of polyethylene film deposited by rf plasma reaction were investigated by replica electron microscopy. Aluminum plates which have various degrees of surface roughness were prepared by electropolishing. Some evidences of a gas-phase-polymerization which was not affected by the substrate morphology were also observed. (Modified author abstract)

Document Details

Document Type
Technical Report
Publication Date
Jan 01, 1974
Accession Number
AD0774125

Entities

People

  • A. T. Bell
  • H. Kobayashi
  • M. Niinomi
  • Meikun Shen

Organizations

  • University of California, Berkeley

Tags

DTIC Thesaurus Topics

  • Abstracts
  • Alkenes
  • Aluminum
  • Dielectric Polymers
  • Electron Microscopy
  • Electrons
  • Electropolishing
  • Ethylenes
  • Films
  • Finishes
  • Materials
  • Materials Processing
  • Microscopy
  • Roughness
  • Substrates
  • Surface Roughness

Fields of Study

  • Materials science

Readers

  • Thin Film Deposition Science.

Technology Areas

  • Microelectronics
  • Microelectronics - Graphene