Measurement of X-Ray Cross Sections Relevant to a Scanning Ion Microscope.
Abstract
The purpose of the study is to determine the feasibility of using X rays generated by heavy ion-atom collisions as the monitoring signal in an ion microscope. Experimental progress in the design, construction, and operation of an experimental apparatus to measure the rate of X-ray production by heavy ions is described. Particular attention is paid to a new type of soft X-ray spectrometer. Preliminary X-ray cross sections obtained with the described apparatus are presented for 1.0 to 2.5 MeV ions incident upon a thin carbon target. The cross sections are found to increase with ion velocity in the range studied. (Modified author abstract)
Document Details
- Document Type
- Technical Report
- Publication Date
- Oct 26, 1973
- Accession Number
- AD0775547
Entities
People
- Frederick W. Martin
- Robert K. Cacak
- Song Sik Choe
Organizations
- University of Maryland