Electronic Surface Studies of Vacuum-Integrated-Circuit Components.
Abstract
Microelectronic vacuum-integrated-circuit components were studied to determine the emission capability of a newly developed electron emitter which is necessary for vacuum-integrated-circuit operation, to determine the surface-potential variations in the cathode and grid structures, and to determine the effects of migration, transport, and diffusion. (Modified author abstract)
Document Details
- Document Type
- Technical Report
- Publication Date
- Dec 21, 1973
- Accession Number
- AD0775588
Entities
People
- George A. Haas
- Henry F. Gray
Organizations
- United States Naval Research Laboratory