Quasi-Static Capacitance-Voltage Characteristics of MNOS Devices.
Abstract
The quasi-static (low-frequency) capacitance-voltage (CV) characteristics of metal-nitride-oxide-semiconductor (MNOS) memory devices are shown to exhibit distinguishable properties associated with memory and nonmemory behavior. Quasi-static CV analysis procedures, as developed by Kuhn, are applied to the MNOS nonmemory characteristics and reveal that the silicon-oxide interface-state densities are 100 times larger than for comparable nonmemory capacitor structures. Substrate surface-potential functions are constructed to model ideal nonmemory CV behavior and are used to compare with memory CV characteristics. Calculations are performed to show that the switching behavior observed experimentally is consistent with the quasi-static CV memory characteristics and with the mathematical models. Also, nonequilibrium quasi-static effects observed for MNOS memory transistor structures and deviations in normal quasi-static CV behavior of MNOS nonmemory capacitor structures are reported. (Author)
Document Details
- Document Type
- Technical Report
- Publication Date
- Dec 01, 1973
- Accession Number
- AD0777586
Entities
People
- George W. Trever
Organizations
- Air Force Institute of Technology